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 Semiconductor equipment depend on Mass Flow Controller (MFC) and Liquid Vapor Controller (LVC) for their layering, patterning, doping and heat treating silicon wafers to make semiconductor integrated circuits (IC). A clean environment with gas, vapor, and liquid control precision is always required as the integrated circuit line width gets smaller.
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AFC 310MD
AFC 410MD
AFC 510MD
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AFC 80MD |
AFC 50D |
AFC 202D |
AFC
260/261
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| RTP |
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| Ion implant |
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| Dry etch |
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| CVD |
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| PVD |
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| Diffusion |
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| Oxidation |
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| Epitaxy |
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| Vacuum control |
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Metrology &
inspection |
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| Facilities |
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best choice |
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