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Qualiflow acquired Jipelec in 2002 and took a stake in Lintec in 2001. The primary purpose of these strategic decisions is to significantly enhance the liquid delivery options that Qualiflow brings to the market. Additionally, we are able to offer a broader line of outstanding gas Mass Flow Controller to our customers and to increase our ability to serve R&D labs and research centers.
Lintec, our Japanese partner, offers products for direct liquid injection. Typical applications are vaporization and supply systems for LPCVD, APCVD, MCVD and MOCVD.
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| Category of film |
Application |
Thin film |
Precursor (Example) |
| Dielectric |
Dielectric |
SiO2 |
TEOS |
| Si3N4 |
HSi(NMe2)3, MeSi(NMe2)3 |
| BPSG |
TEOS, TEB, TEPO |
| High-k dielectric |
Capacitor
DRAM |
Ta2O5 |
Ta(OEt)5 |
| BST |
Ba(thd)2 |
| Ba(Methd)2 |
| Sr(thd)2 |
| Sr(Methd)2 |
| Ti(OiPr)2(thd)2 |
| Ti(OtBu)2(thd)2 |
| Gate dielectric |
HfO2 |
TDEAH, TDMAH |
| Hf(OtBu)4, Hf(OtBu)2(mmp)2 |
| ZrO2 |
Zr(OtBu)4 |
HfxAlyOz
LaAlO3 |
Al(mmp)3
La(thd)3 |
| MIM, MIS |
SrTiO3 |
Sr2Ti2(thd)4(OiPr)8 |
| BaTiO3 |
Ba(thd)2, Ti(OiPr)2(thd)2 |
Ferroelectrics
FeRAM |
Capacitor |
PZT |
Pb(thd)2 |
| Zr(OtBu)4, Zr(thd)4 |
| Ti(OiPr)2(thd)2 |
| SBT |
Sr[Ta{OEt}5{OC2H4N(CH3)2}]
2 |
| Bi(CH3)3, Bi•3 |
| Sr(thd)2pmdeta |
| Bi( o-tol)3 |
| Ta(OiPr)4(thd) |
| SBTN |
Sr[Ta{OEt}5{OC2H4N(CH3)2}]
2 Bi(CH3)3, Bi•3
Nb(OiPr)5 |
| PLZT |
Pb(thd)2, La(thd)3, Zr(thd)4, Ti(OiPr)2(thd)2 |
| Metal |
Wiring |
Cu |
Cu(hfac)mhy |
| Cu-ATMS ? |
| Electrode |
Ru |
Ru(EtCp)2 |
| Ru(OD)3 |
| Barrier Metal |
TiN |
TDMAT, TDEAT |
| TaN |
TBTDET |
| Low-k |
Dielectric |
Various |
Various |
| Other devices |
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NbN |
Nb(NEt2)5
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| Piezoelectric |
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(Pb,Sr)(Zr,Ti)O3 |
Pb(thd)2, Sr(thd)2, Zr(thd)4,
Ti(OiPr)2(thd)2
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MPT (*1) |
Pb(thd)2, Ti(OiPr)2(thd)2
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| Pyroelectric |
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(Pb,Ca)(Zr,Ti)O3 |
Pb(thd)2, Ca(thd)2, Zr(thd)4,
Ti(OiPr)2(thd)2
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| Superconductor |
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YBCO |
Y(thd)3, Ba(thd)2, Cu(thd)2 |
| Bi-2223 |
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| Bi-2212 |
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| CMR (*2) |
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BaFe12O19 |
Ba(thd)2, Fe(acac)3 |
| La1-xMnO3-y |
La(thd)3, Mn(acac)3 |
| Thermal barriers |
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YSZ |
Y(thd)3, Zr(thd)4 |
| ZrO2 |
Zr(thd)4 |
| CeO2 |
Ce(thd)4 |
| Y2O3 |
Y(thd)3 |
| MgO |
Mg(thd)2 |
| Al2O3 |
Al(OiPr)3, Al(OtBu)3, Al(thd)3 |
| SiO2 |
TEOS |
Buffer layers for
superconductor |
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CeO2 |
Ce(thd)4 |
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SrTiO3 |
Sr2Ti2(thd)4(OiPr)8 |
Mechanical
coating |
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ZrN |
Zr(NEt2)4, Zr(NMe2)4 |
| TiN |
TDMAT, TDEAT |
| Si3N4 |
HSi(NMe2)3, MeSi(NMe2)3 |
| Cr2O3 |
Cr(acac)3, Cr(thd)3 |
| Fe2O3 |
Fe(OEt)3, Fe(Cp)2, Fe(acac)3 |
| NbN |
Nb(NEt)5 |
| Optical coating |
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TiO2 |
Ti(OiPr)4 |
| Ta2O5 |
Ta(OEt)5 |
| Y2O3 |
Y(thd)3 |
| Sc2O3 |
Sc(thd)3 |
| Optics |
Oxides
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Nb2O5, SnO2 |
Nb(OiPr)5, Sn(OtBu)4 |
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Anti reflecting
layers
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TiO2 |
Ti(OiPr)4 |
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Super mirrors |
(Ta2O5/SiO2)n |
Ta(OEt)5, TEOS |
Conductive
membranes |
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La1-XSrXGa1-YMyO3 (M=Fe, Co, Ni) |
La(thd)3, Sr(thd)2, Ga(thd)3,
Fe(acac)3, Ni(thd)2, Co(acac)2 |
| La1-XSrXMnO3 |
La(thd)3, Sr(thd)2, Mn(thd)3 |
| La1-XCaXMnO3 |
La(thd)3, Ca(thd)2, Mn(thd)3 |
Transparent
conductive oxides |
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ITO , doped
SnO2 |
In(acac)3, Sn(OtBu)4 |
| Anticorrosion |
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SiO2 |
TEOS |
| Hard coating |
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TiN, TiCN |
TDMAT, TDEAT |
| Display devices |
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SiO2 |
TEOS |
| Optical fibers |
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SiO2, GeO2,
SixGe1-xO2 |
SiCl4, GeCl4 |
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(*1): Modified Lead Titanate (*2): Colossal Magneto Resistance
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Qualiflow is the European and North American Support Center for Lintec.
If you need further information, please feel free to contact us at:
- Tel: +33 (0)467 994 747
- Email: vaporization@qualiflow.com
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