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To find the most suitable MFC within Qualiflow's range, 3 convenient possibilities:
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 Digital Gas Mass Flow Controllers
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 AFC 202D, AFM 302D, the best solutions for high flow from 30slm to 400slm.
Download documentation
AFC 50 D, AFM 55 D, suitable for high performance from 10sccm to 30slm with elastomeric seals in standard.
Download documentation
AFC 80 MD, AFM 85 MD are dedicated to systems using reactive gas from 10sccm to 30slm. All metal seals, ultra clean finish and no particle generation.
Download documentation
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| MC-3000, MC-4000 and MC-5000 are built to answer the most demanding 300mm applications (APCVD, LPCVD, MCVD, Etching processes, etc...): new generation piezoelectric valve, all metal seals with the full potential of digital technology. |
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MC-3000 standard and multipurpose product.
Download documentation
MC-4000 featured by 1"1/8 size for small footprint designs.
Download documentation
MC-5000 offers DeviceNet communication.
Download documentation
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Analog Gas Mass Flow Controllers & Meters
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D07-09E is a high performance elastomer sealed MFC with advanced
analog electronics. Flow rate up to 250slm full scale. Drop-in replacement for most standard MFCs.
Download documentation
D07-16A is a metal sealed MFC with
advanced analog electronics. Full scale flows as low as 5 sccm. Suitable for high inlet pressure applications. Drop-in replacement for
most standard MFCs.
Download documentation
D07-18/18A is a high performance
elastomer sealed MFC with advanced analog electronics. Drop-in replacement for most standard MFCs.
Download documentation
D07-19/19A is a high performance
elastomer sealed MFC with advanced analog electronics. Suitable for high inlet pressure applications, it provides wide flow range.
Drop-in replacement for most standard MFCs.
Download documentation
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AFC 50, AFM 55 are suitable for flow rates from 10sccm to 30slm, featuring a unique reliable horizontal electromagnetic valve.
Download documentation
AFC 260, AFM 360 target applications that require great process stability and reliability using flow rates from 10sccm to 5slm.
Download documentation
AFC 261, AFM 361: Based on the same technology than as the 260 and 360 series, they each can handle flow rates from 10slm to 20slm.
Download documentation
AFC 202, AFM 302: This series is the best solution for high flow from 30slm to 400slm.
Download documentation
LVC 414: This Liquid Vapor Controller is designed to measure and control the mass flow rate of doping materials by varying the flow of carrier gas through a bubbler containing the source material.
Download documentation
AFM 10: This mass flow meter is designed to replace rotameters whenever a signal of the flow is required. Flow rate from 2slm and 60slm. Made in brass material, the AFM10 has a small footprint and is used for vacuum control.
Download documentation
AFM 11 is a cost-saving flow meter used in vacuum control systems. Flow rate from 60slm to 120slm. Compact housing made of brass.
Download documentation
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| Digital Liquid Mass Flow Controllers & Meters
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LM-2100A, The LM-2100A liquid
mass flow meter measures various liquid material flow rates with high precision.
Download documentation
LM-2100A-BP, The LM-2100A-BP
liquid mass flow meter measures various liquid material flow rates with high precision. The patented original thermal mass flow sensor is
incorporated for measuring flow rate. In addition, combination with vaporizer VU series makes high precision and high speed vaporization possible.
Download documentation
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Digisoft™ : Free-of-charge software provided with our digital mass flow controllers and meters. It helps easily define the flow control, tune multiple gas calibration, make automatic diagnosis, set up alarms, collect data, define autozero, soft-start and ramping and many other features...
Download documentation
Download Digisoft™ software
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Atomizer® for PDA: Atomizer is
a software for PDAs that help to reduce tool downtime and improve productivity by accelerating digital MFC troubleshooting. Connected
with the digital MFC through an infrared or serial port, it allows users to monitor and adjust flow rate, valve and
setpoint.
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We provide a full range of accessories such as Readout Boxes, Flow Accumulator, Heat Exchangers,
Filters, UHP Filters, Check Valves, Interconnecting Elements (union, elbow, tee, cross, jumper cross), Mounting Plates and Mounting Bars.
Ask us about any type of fittings (at various pitches) and our series of connectors and mounting brackets for full compatibility with your existing equipment whatever the brand is.
Download documentation :
Check valves documentation
Filters documentation
UHP filters documentation
Interconnecting elements documentation
Mounting plates documentation
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NEW PRODUCTS
MobiPanel :
Liquid panel designed to feed each liquid input line of a CVD or ALD vaporizer with one
precursor or precursor mixture.
Download documentation
JetPress :
Low flow pressure controller with extremely stable pressure over time achieved.
Download documentation
Bubblers :
Bubbling systems for liquid source evaporation. Bubblers are customizable from 3L up to 60L.
Download documentation
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Readout Boxes D08 Series :
D08 series Flow Readout Boxes provide a power supply for MFCs or MFMs and allow the user
to set and display the flow for a controller or meter.
D08-1D readout box documentation
D08-2D/3D/4D readout box documentation
Flow Accumulator D08 Series :
D08 series Flow Accumulators provide a power supply for Mass Flow Controllers or Mass Flow Meters and
allow the user to set and display the flow for a controller or meter.
Download documentation
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Heat Exchanger HX-10 :
The HX-10 is an efficient compact heat exchanger with built-in thermocouple and thermal switch to detect overheating.
Download documentation
Heat Exchanger HX-101 :
The HX-101 is an efficient compact heat exchanger of gases, up to 300L/min, with built-in thermocouple and thermal switch to detect overheating.
Download documentation
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Our MFCs can support the following protocols:
- DeviceNet or Profibus for high speed protocol.
- RS485 mode to control up to 32 MFC's.
- MODBUS protocol through a RJ11 connector.
Qualiflow's MFCs are 100% compatible with the analog series by sharing a serial RS232C link for maintenance, calibration or individual control. A standard DB15 connector is used.
Download documentation
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Options
A full range of options is available with our MFCs in order to meet your standard or custom specifications. Among the different possibilities, we offer a Low Delta Pressure option which works with a very small pressure drop.
Download documentation
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