MobiPanel, designed to feed each liquid input line of a CVD or ALD vaporizer with one precursor or precursor mixture.
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 JetPress, Low flow pressure controller with extremely stable pressure over time achieved.
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 Bubblers, Bubbling systems for liquid source evaporation. Bubblers are customizable from 3L up to 60L.
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 VU-410/420, The VU-410/420 controls and vaporizes various liquids efficiently through combination with the LM-2100A liquid mass flow meters.(Patent pending).
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 VU-430, Precise flow rate control and efficient vaporization of a wide variety of liquids through combination with the LM-2100A liquid mass flow meter (Patent pending).
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 VU-450, The VU-450 vaporizer unit provides precise flow rate control and efficient, non-contact vaporization of a wide variety of liquids through combination with the LM-2100A liquid mass flow meters (Patent pending).
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 VU-D450 / T450, The VU-D450/T450 vaporizer unit provides precise flow rate control and efficient, non-contact vaporization of up to 3 precursors through combination with the LM-2100A liquid mass flow meters.
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 VU-D50 / T50, Designed exclusively for TEOS chemistries, the VU-D50/T50 vaporizers provide precise flow rate control, efficient non-contact vaporization and premixing of up to 3 precurors using the LM-2100A liquid mass flow meters.
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 VU-510, The VU-510 can control and vaporize various liquids efficiently through combination with the liquid mass flow meter LM-2100. [Patent Pending]
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 VU-550 series, The VU-550 series (VU-550, VU-D550, VU-T550 and VU-Q550) vaporizer unit provides precise flow rate control and efficient, non-contact vaporization of up to 4 precursors through combination with the LM-2100A liquid mass flow meters.
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 LM-2100A, The LM-2100A liquid mass flow meter measures various liquid material flow rates with high precision.
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 LM-2100A-BP, The LM-2100A-BP liquid mass flow meter measures various liquid material flow rates with high precision. The patented original thermal mass flow sensor is incorporated for measuring flow rate. In addition, combination with vaporizer VU series makes high precision and high speed vaporization possible.
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 HX-10, The HX-10 is an efficient compact heat exchanger with built-in thermocouple and thermal switch to detect overheating.
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 HX-101, The HX-101 is an efficient compact heat exchanger of gases, up to 300L/min, with built-in thermocouple and thermal switch to detect overheating.
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